Active Ion Gauge

Edwards Active Ion Gauge

The Active Ion Gauge (AIGX) is a compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6x10⁻² to 6.6x10⁻¹⁰ mbar and a 1 Volt/decade linear output.

The AIGX incorporates all benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments.

The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Full 8-decade measurement capability, to 6.6x10⁻¹⁰mbar

Two versions available

each with three vacuum coupling variants: ‘D’ versions have a 9-pin ‘D’ connector and standard interface;

Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors.

Automatic filament protection against switching on at atmosphere and running or degassing at high pressure.

Technical Data

Pressure range

Accuracy

Max overpressure

Temperature range Operating

Temperature range Storage

mbar

mbar

bar

°C

°C

Edwards AIGX-S

AIGX-S

6.6 x 10-2 to 6.6 x to 10-10

Typically +/- 15%

10 bar absolute (145 psi)

0 to +40

-30 to +70

Documentation

Spectroscopy magazine

Edwards Medidor Iónico Activo
Edwards Active Ion Gauge

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