Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10-8 mbar (1.2 x 105 to 1x10‑6 Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed. The BGV manual valves have a visual indication of the gate position on the side of the assembly to show when it is open.
Avoids re-start issues by keeping the pump running during maintenance
Long service life and reliability in harsh environments.
Minimises damage due to particulates in dusty processes.
Leak rate (body / Valve seat)
Max Operating temperature (valve body)
Cycles until first service
<1x10-9 / <1x10-7
1x10-8mbar to 1.2 bar
NW50, ISO63, ISO80, ISO100, ISO160