Pneumatic Gate Valves

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Edwards Pneumatic Gate Valves

Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.

They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10-8 mbar (1.2 x 105 to 1x10-6 Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed.

The BGV Mk2 pneumatic variant has reed switches which can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs providing a visual display of the valve position. Each BGV Mk2 pneumatic valve is fitted with a 24 V a.c./d.c. solenoid and pre-wired plug for direct connection to your Edwards latest generation vacuum pump. This 15-way “D” plug offers a single point of connection for both power to the solenoid and the signal from the reed switch position indicators.

In order to connect the BGV Mk2 pneumatic valve to Edwards legacy products the BGV Mk2 TIM interface cable should be used. Lock Out Tag Out (LOTO) versions are also available.

Able to withstand 1.2 bar absolute in either direction

Avoids re-start issues by keeping the pump running during maintenance

Stainless steel construction and robust design

Long service life and reliability in harsh environments.

Pneumatic solenoid and pre-wired option

Simple grease-free sealing mechanism

Minimises damage due to particulates in dusty processes.

Pre‑configured simple ‘plug and play’ installation.

Lock Out Tag Out (LOTO) versions are also available.

Technical Data

Leak rate (body / Valve seat)

Pressure range

Max Operating temperature (valve body)

Cycles until first service

Available with

mbar l/s

°C

BGV Mk2

<1x10-9 / <1x10-7

1x10-8 mbar to 1.2 bar

150

5000

NW50, ISO63, ISO80, ISO100, ISO160

BGV LOTO

<1x10-9 / <1x10-7

1x10-9 mbar to 1.2 bar

120

20000

NW50, ISO63, ISO80, ISO100, ISO160

Documentation

Spectroscopy magazine

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