ISO fittings provide high corrosion resistance in semiconductor processing and excellent repeatability across the range of low to high vacuum applications. The flanges are joined using either claw clamps or bolts with a fluoroelastomer or nitrile centring ring and O ring.
• Manufactured to ISO 1609 and DIN 28404 standards
• Nominal diameters 40-630 mm
• ISO-F flanges have fixed hole patterns
• ISO-K flanges are typically joined with claw clamps and can be converted/connected to ISO-F using a rotatable collar or half claws
• For use in high-vacuum applications: pressures > 10-8 mbar
ISO Dimensions
ISO40
ISO63
ISO80
ISO100
ISO160
ISO200
ISO250
ISO320
ISO400
ISO500
ISO630
A
65
95
110
130
180
240
290
370
450
550
690
B
41
70
83
102
153
213
261
318
400
501
630
C
48.3
76.1
88.9
114.3
160.3
219
261
318
400
501
630
D
2.5
80
95
115
165
225
275
355
435
535
660
E
100
130
145
165
225
275
355
425
510
610
750
F
80
110
125
145
200
260
310
395
480
580
720
G
9
9
9
9
11
11
11
14
14
14
14
H
4
4
8
8
8
12
12
12
16
16
20
J
10
10
10
10
10
10
10
15
15
15
20
K
5
5
5
5
5
5
5
7.5
7.5
7.5
10
R
1.5
1.5
1.5
1.5
2.5
2.5
2.5
2.5
4
4
5
ISO Flange Assembly
Double claw clamps slot into a circular groove around the flange (ISO-K figure A) and secured to provide a simple but secure flange connection. The more conventional method is to use a range of bolt holes and nut/bolts with either a rotatable (ISO-F figure B) or fixed collar (figure C) flange.
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