ISO Flange Assembly

ISO fittings provide high corrosion resistance in semiconductor processing and excellent repeatability across the range of low to high vacuum applications. The flanges are joined using either claw clamps or bolts with a fluoroelastomer or nitrile centring ring and O ring.

• Manufactured to ISO 1609 and DIN 28404 standards

• Nominal diameters 40-630 mm

• ISO-F flanges have fixed hole patterns

• ISO-K flanges are typically joined with claw clamps and can be converted/connected to ISO-F using a rotatable collar or half claws

• For use in high-vacuum applications: pressures > 10-8 mbar

ISO Dimensions

ISO40

ISO63

ISO80

ISO100

ISO160

ISO200

ISO250

ISO320

ISO400

ISO500

ISO630

A

65

95

110

130

180

240

290

370

450

550

690

B

41

70

83

102

153

213

261

318

400

501

630

C

48.3

76.1

88.9

114.3

160.3

219

261

318

400

501

630

D

2.5

80

95

115

165

225

275

355

435

535

660

E

100

130

145

165

225

275

355

425

510

610

750

F

80

110

125

145

200

260

310

395

480

580

720

G

9

9

9

9

11

11

11

14

14

14

14

H

4

4

8

8

8

12

12

12

16

16

20

J

10

10

10

10

10

10

10

15

15

15

20

K

5

5

5

5

5

5

5

7.5

7.5

7.5

10

R

1.5

1.5

1.5

1.5

2.5

2.5

2.5

2.5

4

4

5

ISO Flange Assembly

Double claw clamps slot into a circular groove around the flange (ISO-K figure A) and secured to provide a simple but secure flange connection. The more conventional method is to use a range of bolt holes and nut/bolts with either a rotatable (ISO-F figure B) or fixed collar (figure C) flange.

Documentation

Spectroscopy magazine

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