Industrial > Other Equipment

We offer a wide range of turbomolecular and diffusion pumps, as well as vapour boosters for large pumping capacities. In addition, when a ready-to-go high vacuum pumping solution is required, we have a range of turbomolecular pumping stations, combining a backing pump, turbomolecular pump and controller into a compact package.

Peak pumping speed N2

Peak pumping speed Ar

Peak pumping speed He

Peak pumping speed H2

Maximum backing pressure N2

Units

l/s

l/s

l/s

l/s

mbar

EXT75DX

42

39

49

48

8

nEXT85

47

44

61

49

18

nEXT240

240

230

230

165

9.5

nEXT300

300

280

340

280

9.5

nEXT400

400

380

390

325

9.5

Pumping speed N2

Pumping speed H2

Ultimate Vacuum (CF)

Maximum flow rate

Maximum power consumption

Units

l/s

l/s

mbar

sccm

W

STP301

DN100

300

300

<1x10-10

-

350

STP451

DN160

480

460

<1x10-10

-

350

STP603

DN160

650

550

<1x10-10

-

850

STP1003

DN200

1000

800

<1x10-10

-

850

STPiX455

DN100

300

300

<1x10-10

-

300

STPiX455

DN160

450

460

<1x10-10

-

300

STPiXR1606

DN160

1000

800

<1x10-9

4700

750

STPiXR1606

DN200/250

1600

1200

<1x10-9

4700

750

Pumping speed for N2 NW40

Pumping speed for N2 ISO/ CF63

Backing pump speed 50 Hz (wet)

Backing pump speed 50 Hz (dry)

l/s

l/s

m3/h

m3/h

T-Station 75

42

61

1.6

1.2

T-Station 85

47

84

1.6

1.2

Turbopumping station

42

61

1.6 - 12

1.2 - 22

Peak pumping speed

Ultimate vacuum

Cooling water consumption

Power at ultimate

m3/h

mbar

l/h

kW

EPX180LE

175

<1x10-4

120

1.4

EPX180NE

175

<1x10-4

120

1.6

EPX500LE

500

<1x10-6

120

1.4

EPX500NE

500

<1x10-6

120

1.6

Pumping speed (M&P/C) Nitrogen

Pumping speed (M&P/C) Hydrogen

Minimum backing pump displacement

Oil charge capacity

l/s

l/s

m3/h

ml

Diffstak 63

135

200

5

60

Diffstak 100

280

500

5

125

Diffstak 160

700

1300

12

250

Diffstak 250

2000

3000

40

500

Pumping speed air

Pumping speed hydrogen

Maximum throughput

Recommended backing pump displacement

l/s

l/s

mbar l/s

m3/h

18B4B

4000

6000

100

190

30B5M

12500

15000

300

290

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