STP Maglev Pumps

The STP has a market leading reputation for quality and reliability. Available in four different ranges - Ultra High Vacuum; High Throughput; Ultra Low Vibration and Integrated Controller - it is considered by many as the Rolls Royce of turbomolecular pumps.

300 - 4.300 l/s

Wide range of sizes, inlet flanges and special versions

Extremely Reliable

The STP is trusted and relied upon by industrial and labotary customers worldwide

5-Axis Full Maglev

Exceptional 5-axis full maglev pump performance, with zero hydrocarbon lubrication

Extremely Robust

Automatic balancing systems, corrosion resistance versions, power failure protection

10 Years

between services can be achieved with these pumps. No routine or preventive maintenance is required

Edwards STP sizes

The integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.

Inlet flange*

ISO

ICF

Pumping Speed

N2

H2

Ar

Compression ratio

N2

H2

Ultimate pressure

l/s

l/s

l/s

Pa

iX455

100K/160K

-

300/450

300/460

-

>108

>1x104

6.5x10-6

*VG flanges also available.          ** extreme low vibration available

iXR1606

160F

203

1000

800/

-

>108

>1x104

6.5x10-6

iXR1606

200F/250F

253/305

1600

1200

-

>108

>1x103

10-7

iXR2206

200F

253

1850

1250

1650

>108

>1x103

10-7

iXR2206

250F

305

2200

1350

2000

>108

>1x103

10-7

iXA2206A

250F

305

2200

1700

1900

>108

1.0x104

10-7

iXA3306C

250F

305

2650

2050

2300

>108

2x103

10-7

iXA3306C

320F

356

3200

2300

2800

>108

2x103

10-7

iXA4506C

320F

-

4000

2700

3400

>108

1x103

10-7

The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.

Inlet flange

Pumping speed

N2

H2

Compression ratio

N2

He

H2

Ultimate Pressure with bake out heating

ISO flange

ICF flange

l/s

l/s

Pa

Pa

STP301

ISO100 / ICF152

300

300

>108

5x105

2x104

6.5x10-6

10-8

STP451

ISO160 / ICF203

480

460

>108

5x105

2x104

6.5x10-6

10-8

STP603

ISO160

650

550

>108

-

>105

6.5x10-6

-

STP1003

ISO200

1000

800

>108

-

>105

10-6

-

The multi-axis magnetic bearing system is used to suspend the rotor during operation, ensuring there is no risk of contamination while minimising vibration, noise and maintenance requirements.

The STP pumps can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. They offer class leading pumping performance demonstrating exceptional levels of reliability, and are widely accepted in the market with the installed base of over 140,000 units worldwide.They are the preferred choice for many of the most challenging semiconductor applications. For laboratory applications this makes STP maglev turbomolecular pumps extremely reliable.

Product Features

CORROSION RESISTANCE

most models of Edwards STP maglev turbomolecular pumps are also available in a special corrosion resistant version with nickel coated rotors and a nitrogen purge facility, making them ideal for chemical laboratory applications.

OIL FREE

ensures  clean vacuum, low power and low vibration.  the use of magnetic bearings eliminates all hydrocarbon lubricants.

VIBRATION FREE

magnetic levitation means no friction and thus extremely low vibration, in addition this remains constant and does not change as parts wear.

AUTOMATIC BALANCING SYSTEM

Edwards 5-axis pumps are able adjust the magnetic field dynamically to take out rotor imbalances.

MAINTENANCE FREE

zero friction means no wear and thus no routine maintenance is required in normal operation.

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