Industrial> Other Equipment > Turbomolecular Pumps

A turbomolecular pump (TMP) is a multi-stage axial‑flow turbine in which high speed rotating blades provide compression by increasing the probability of gas molecules moving in the pumping direction. The turbomolecular pump is optimised for molecular flow conditions and requires a suitably sized two stage rotary vane pump or an oil free scroll pump to exhaust to atmosphere.

A compound molecular pump (CMP) is based on the concept of combining bladed turbomolecular stages with molecular drag stages on the same rotor. This design allows:

• High critical foreline pressures (typically up to 10 mbar)

• Options to use smaller backing pumps or dry diaphragm backing pumps

400 l/s

<5x10 -10

to 4500 l/s

<1x10 -10

47 - 400 l/s

<5x10 -10

Peak pumping speed N2

Peak pumping speed Ar

Peak pumping speed He

Peak pumping speed H2

Maximum backing pressure N2

l/s

l/s

l/s

l/s

mbar

EXT75DX

42

39

49

48

8

nEXT85

47

44

61

49

18

nEXT240

240

230

230

165

9.5

nEXT300

300

280

340

280

9.5

nEXT400

400

380

390

325

9.5

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