R&D > UHV XHV

Capture pumping technologies create high vacuum (HV) and ultra-high vacuum (UHV) environments for a variety of applications, ranging from portable mass spectrometers to large scale particle accelerators. They can create the highest possible vacuum at an economical cost. Edwards offers a range of Ion Pumps, Titanium Sublimation Pumps, Non-Evaporable Getter Pumps and accessories exclusively through Gamma Vacuum.

Pumping speed

Ultimate pressure

Starting pressure

Operating bake temp

Max. bake temp (Magnets removed)

Units

l/s

mbar

mbar

5S

4-5

<1x10-11

<1x10-3

200

450

10S

8-10

<1x10-11

<1x10-3

250

450

25S

15-20

<1x10-11

<1x10-3

250

450

45S

30-40

<1x10-11

<1x10-3

250

450

75S

40-75

<1x10-11

<1x10-3

250

450

100L

80-100

<1x10-11

<1x10-3

250

450

200L

160-200

<1x10-11

<1x10-3

250

450

300L

240-300

<1x10-11

<1x10-3

250

450

Pumping speed for N2 NW40

Pumping speed for N2 ISO/ CF63

Backing pump speed 50 Hz (wet)

Backing pump speed 50 Hz (dry)

l/s

l/s

m3/h

m3/h

T-Station 75

42

61

1.6

1.2

T-Station 85

47

84

1.6

1.2

Turbopumping station

42

61

1.6 - 12

1.2 - 22

Pumping speed H2

Pumping speed CO

H2 sorption capacity

CO (25ºC) sorption capacity

CO Total sorption capacity

Units

l/s

l/s

Torr l

Torr l

Torr l

N50

55

27

630

0.1

284

N100

106

51

1170

0.2

526

N200

208

94

2160

0.4

972

N300

312

125

2880

0.6

1296

N400

412

156

3600

0.8

1620

Open circuit voltage

Current (maximum)

Watts (maximum)

Resolution

mA

W

SPC e

3000-7000 V d.c.

50

50

1 nA

QPC e

3000-7000 V d.c.

125

125

1 nA

TSP / NEG

+17 V a.c.

55

800

0.1 A

Subscribe