Fused Silica EUV Viewports

Fused silica viewports offer increased transmission of UV and IR wavelengths. We offer fused silica viewports in three grades; UV grade with window material HPFS^® fused silica standard grade, DUV grade with window material HPFS_^®fused silica KrF grade, and Excimer UV with window material HPFS^® fused silica ArF grade. We also offer a range of anti-reflection coated fused silica viewports which have an anti-reflective coating applied to both sides of the vacuum window, achieving maximised transmission for various laser types.

Features:
• UHV compatible.
• Synthetic fused silica

Specifications:
Materials
Window : Corning HPFS^® 7980 fused silica
Carrier : Titanium.
Flanges : 316LN St.St.

Max. Bakeout Temperature* : 
CF flanged viewports : 200°C

Max. Thermal Gradient : 25°C per minute

Optical properties
Surface finish : 20/10 scratch/dig
Flatness : λ/4 @ 632nm transmitted wavefront
UV transmission @ 193nm (internal) : >99.5%
parallelism : <10 arc seconds
Homogeneity grade : A
Inclusion class : 0
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* – Assembly rating is reduced to that of the lowest rated component.