Calibration System ECAL1

The Edwards calibration system ECAL1 is a fully automatic pumping system based on the Edwards T-station 85H turbomolecular pumping station.

The systems are supplied with a vacuum chamber attached, and are equipped with two reference pressure gauges, with Edwards Barocel 7025.

The calibration system has been designed for use in a wide range of applications where accuracy and repeatability of vacuum measurement is an important aspect of the quality process, and to safeguard the process stability and product quality.

Calibration system ECAL1 provides output comparison between reference gauges and test gauges for a pressure measurement range from 1000 to 10-4mbar. The user must define the acceptable tolerance between reference gauges and the test gauges, whilst taking into consideration the uncertainty of different calibration process conditions. Note that no adjustments are to be performed on the test gauges during the calibration procedure.

Enchufar y Bombear
With no systemisation and no additional air
cooling required

Controlador TIC
Automatically recognizes and controls
active gauges.

Fácil de usar
fully assembled
and ready to go for quick and easy operation

Mantenimiento
Todas las combinaciones de bombas primarias y turbos pueden ser reparadas por el usuario final

Operación silenciosa
Todas las combinaciones de carritos nEXT ofrecen bajos niveles de ruido y vibración

Fácil de controlar
Easy operation with all controller options and advanced functionality TIC

I+D > Bombas de Vacío Primarias > Bombas rotativas de paletas selladas con aceite

Esta amplia gama de bombas robustas, ofrece un excelente vacío con buena velocidad de bombeo. Las bombas RV tienen una capacidad superior para bombeo de vapor, y de manera silenciosa.

3.3 - 12 m3/h

2.0x10-3mbar

0.75 - 27.5 m3/h

a 1x10-3mbar

Calibration Pressure range

Vacío final

Ambient opeerating temperature range

Maximum ambient operating humidity

Ports for calibration vacuum chamber

mbar

mbar

ºC

ºC

Std.Calibration System

between 1000 to 10⁻⁴*

<5x10⁻⁸**

5 a 40

max. 90% RH non-condensing at 40

3x NW16 for calibration gauges / 1x NW16 for gas admit

* depending on the number and measuring range of the reference pressure gauges

** for clean, dry and empty chamber

Comunicación y Control

Controlador TIC

The reference pressure gauges are connected and controlled via a TIC instrument controller. The TIC instrument controller is equipped with an intuitive easy-to-use graphical interface via a touch sensitive panel. The results can be observed on the TIC controller or connected via RS232/485 for control and data monitoring on a remote PC.

Backing Pump

XDD1

XDD1 diaphragm pumps are used for backing small compound turbomolecular pumps in clean, high vacuum applications, and also designed to be free standing bench top units. A typical ultimate pressure of better than 5 x 10⁻⁸ mbar can be achieved when using an XDD1 to back a 70l/s turbomolecular pump.

It is designed to provide a complete pumping package using the Edwards Turbo and Instrument Controller (TIC). By selecting the appropriate mode the pump speed can be controlled by the user to provide variable pumping speed. Under normal conditions the XDD1 is virtually maintenance free, its lifetime is typically > 10,000 operating hours, depending on the application.

Dimensiones

Documentación