Edwards Manual Gate Valves

Manual Gate Valves

Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.

They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10⁻⁸mbar (1.2 x 10⁵ to 1x10⁻⁶ Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed. The BGV manual valves have a visual indication of the gate position on the side of the assembly to show when it is open.

Technical Data

Leak rate (body / Valve seat)

Pressure range

Max Operating temperature (valve body)

Cycles until first service

Available with

mbar l/s

°C

BGV

<1x10⁻⁹ / <1x10⁻⁷

1x10⁻⁸mbar to 1.2 bar

150

5000

NW50, ISO63, ISO80, ISO100, ISO160

Documentation

Spectroscopy magazine

Features & Benefits

Able to withstand 1.2 bar absolute in either direction

Avoids re-start issues by keeping the pump running during maintenance

Simple grease-free sealing mechanism

Minimises damage due to particulates in dusty processes.

Stainless steel construction and robust design

Long service life and reliability in harsh environments.

Pneumatic solenoid and pre-wired option

Pre‑configured simple ‘plug and play’ installation.

Dimensions

Documentation