Dry Vacuum Primary Pumps

Diaphragm
0.5 - 15 m³/h
> 1 mbar

Dry Scroll
6 - 22 m³/h
0.007 mbar

Dry Scroll
35 - 46 m³/h
0.01 mbar

Coming soon!

Dry Multistage Roots
100-200 m³/h
0.02 mbar

Coming soon!

Oil-Sealed Primary Pumps

Rotary Vane
0.7 - 1.5 m³/h
<3x10-3 mbar

Rotary Vane
3 - 12 m³/h
2x10-3 mbar

Rotary Vane
18 - 28 m³/h
<1x10-3 mbar

Rotary Vane
40 - 80 m³/h
<1x10-3 mbar

Rotary Vane
175 - 275 m³/h
<7x10-3 mbar

Rotary Vane
40 - 750 m³/h
0.08 mbar

Turbomolecular

Turbomolecular
400 l/s
<5x10-10

Turbomolecular
<4500 l/s
<1x10-10

Turbomolecular
47-400 l/s
<5x10-10

Turbomolecular
47-84 l/s
<5x10-10

Ion & Getter

Ion Pump
0.2- 1200 l/s
1x10-11 mbar

Ion Pump
>10000 m³/h
1x10-12 mbar

Ion Pump
55 - 412 l/s H2
27-156 l/s CO

Controller Ion Getter
Single / Multiple
TSP

Special Dry Vacuum Pumps

Semiconductor
175 - 500 m³/h
<1x10-6 mbar

Semiconductor
110 - 930 m³/h
0.001 mbar

Semiconductor
90 - 1000 m³/h
0.005 mbar

Semiconductor
100 - 1025 m³/h
0.005 mbar

Booster & Diffusion Vacuum Pumps

Roots Booster
250 - 4200 m³/h
hydrokinetic

Roots Booster
6970 - 8360 m³/h
inverter

Vapour Booster
4000 - 12500 m³/h
100-300 mbar l/s

Diffusion
135 - 18000 l/s
24 mbar l/s

Peak pumping speed

Ultimate Pressure

Power at ultimate

Noise

Inlet connection

m³/h

mbar

kW

dB(A)

EDC65

65

50

-

66

-

GV80

80

0.03

3.6

<78

ISO40

EDC150

150

50

-

75

-

GXS160

160

0.007

3.8

<64

ISO63

GXS250

250

0.004

4.0

<64

ISO63

EDC300

300

140

-

77

-

GXS450

450

0.005

7.2

<64

ISO100

GXS750

740

0.003

10.0

<70

ISO100

Peak pumping speed

Ultimate Pressure

Power at ultimate

Noise

Inlet connection

m³/h

mbar

kW

dB(A)

IDX1000

1000

0.05

30

82

-

GXS160/1750

1200

0.0007

5.1

<64

ISO100

IDX1300

1300

0.05

30

82

-

GXS250/2600

1900

0.0005

5.3

<64

ISO160

GXS450/2600

2200

0.0005

8.8

<64

ISO160

GXS450/4200

3026

0.0005

9.4

<64

ISO160

GXS750/2600

2300

0.0005

11.1

<70

ISO160

GXS750/4200

3450

0.0005

11.5

<70

ISO160

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