EPX High Vacuum

The EPX is a unique pump, patented and designed by Edwards, that is capable of pumping from Atmospheric pressure to 10⁻⁴ and 10⁻⁶, and ideal even in demanding cycling applications

Atm. to < 10⁻⁶ mbar

In a single pump, thanks to a unique and patented mechanism designed and manufactured by Edwards

Compact Footprint

EPX is smaller than the equivalent
turbomolecular pump and primary pump combination

Ultra Clean Mechanism

EPX pumps have no oil or grease under vacuum and present no other source of potential contamination

Unique Patent Protected Pumping Mechanism

The EPX series uses a unique, patented, single-shaft regenerative and Holweck® stage mechanism

10 Years

Low cost of ownership with up to ten years completely maintenance free

Edwards EPX sizes

Peak pumping speed

Ultimate vacuum

Cooling water consumption

Power at ultimate

Noise at ultimate

m³/h

mbar

l/h

kW

dBA

EPX180LE

175

<1x10-4

120

1.4

<56

EPX180NE

175

<1x10-4

120

1.6

<56

EPX500LE

500

<1x10-6

120

1.4

<56

EPX500NE

500

<1x10-6

120

1.6

<56

The EPX series uses a unique, patented, single-shaft regenerative/Holweck® stage mechanism that makes them capable of pumping from atmosphere to ultimate pressures of <1x10⁻⁴ mbar or <1x10⁻⁶ mbar depending on model. They are ideal for applications where a better base pressure is required than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and primary pump would be required and also for applications that cycle frequently from atmosphere to low pressures as they can operate continuously at all inlet pressures.

Product Features

COMPACT FOOTPRINT

EPX is smaller than the equivalent turbomolecular pump and primary pump combination.

HOLWECK AND REGENERATIVE STAGES

for wide range performance with low heat and vibration.

ULTRA CLEAN MECHANISM

EPX pumps have no oil or grease under vacuum and present no other source of potential contamination.

WATER COOLED

for a low environmental head load.

ADDITIONAL HELICAL ROTOR STAGE (EPX500 ONLY)

for increased speed and 1x10⁻⁶ mbar capability.

NITROGEN PURGE FACILITY (N VARIANTS)

which makes them suitable for pumping vapours and low levels of corrosive vapours and particulates.

Documentation

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