iXL Dry Pump


iXL Dry Pump


110 / 930 m³/h 

Hermetically Sealed, innovative mechanism

0.013 / 0.001 mbar

Superior vacuum levels achieved

Plug and Pump

Integral controller and safety systems for flexible operation

<55 dB(A)

Smooth, low noise and vibration operation

No routine maintenance

Oil lubricated precision bearings with no routine maintenance


110 / 930 m³/h 

Hermetically Sealed, innovative mechanism

0.013 / 0.001 mbar

Superior vacuum levels achieved

Plug and Pump

Integral controller and safety systems for flexible operation

<55 dB(A)

Smooth, low noise and vibration operation

No routine maintenance

Oil lubricated precision bearings with no routine maintenance


iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations, with extremely low power consumption.

iXL Sizes

Edwards iXL Vacuum Pumps

iXL120N

iXL1000N

Peak Pumping Speed m³/h

110

930

Ultimate Pressure  mbar

0.013

0.001

Power at Ultimate  kW

0.55

1

 Power in Green Mode kW

0.05

0.045

Noise at Ultimate  dB(A)

<55

<55

iXL Sizes

Edwards iXL Vacuum Pumps

iXL120N

iXL1000N

Peak Pumping Speed

m³/h

110

930

Ultimate Pressure

mbar

0.013

0.001

Power at Ultimate

kW

0.55

1

Power in Green Mode

kW

0.045

0.05

Noise at Ultimate

dB(A)

<55

<55

iXL Sizes

Edwards iXL Vacuum Pumps

iXL120N

iXL1000N

Peak Pumping Speed

m³/h

110

930

Ultimate Pressure

mbar

0.013

0.001

Power at Ultimate

kW

0.55

1

Power in Green Mode

kW

0.045

0.05

Noise at Ultimate

dB(A)

<55

<55

The iXL is available as the iXL120N stand-alone unit, or as the iXL1000N combination, which includes an inverter-driven booster delivering 930 m³/h peak pumping speed.

iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. It’s low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!

Product Features

UNIQUE PERFORMANCE

Class leading chamber pump down time reduces total average cycle time (TACT)

LOW POWER

Only 0.55kW* power consuption helps minimise customers cost of ownership

SMOOTH RUNNING

Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance

COMPACT

iXL120 is extremely small and light, saving valuable space

GREEN MODE

Green Mode can reduce power consumption by up to 92% during idle periods

ZERO PURGE OPTION

Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs

Product Features

LOW POWER

Only 0.55kW* power consuption helps minimise customers cost of ownership

UNIQUE PERFORMANCE

Class leading chamber pump down time reduces total average cycle time (TACT)

SMOOTH RUNNING

Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance

COMPACT

iXL120 is extremely small and light, saving valuable space

ZERO PURGE OPTION

Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs

GREEN MODE

Green Mode can reduce power consumption by up to 92% during idle periods

Subscribe