Active Ion Gauge

The Active Ion Gauge (AIGX) is a compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6x10⁻² to 6.6x10⁻¹⁰ mbar and a 1 Volt/decade linear output.

The AIGX incorporates all benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments.

The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Technical Data

Pressure range

Accuracy

Max overpressure

Temperature range Operating

Temperature range Storage

Flange

External interface connectors

Variant

mbar

mbar

bar

°C

°C

Edwards AIGX-S

AIGX-D

6.6 x 10⁻² to 6.6 x to 10⁻¹⁰

Typically +/- 15%

10 bar absolute (145 psi)

0 to +40

-30 to +70

NW25 / NW16 / CF40

9-way ‘D’ type plug (pins)

Manual control

AIGX-S

6.6 x 10⁻² to 6.6 x to 10⁻¹⁰

Typically +/- 15%

10 bar absolute (145 psi)

0 to +40

-30 to +70

NW25 / NW16 / CF40

8-way FCC68/R145 socket

Automatically switches at 1.33 x 10⁻⁵ mbar

Documentation

Spectroscopy magazine

Features & Benefits

Full 8-decade measurement capability, to 6.6x10⁻¹⁰mbar

Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors

Automatic filament protection against switching on at atmosphere and running or degassing at high pressure

Two versions available

each with three vacuum coupling variants: ‘D’ versions have a 9-pin ‘D’ connector and standard interface; ̶‘S’ versions have enhanced functionality and are fully
compatible with the range of Edwards controllers

Continuous pressure measurement output during degas

Innovative design eliminates the effects of X-ray limits

Dimensions

Documentation