Ion Gauge
(10⁻² - 10⁻¹⁰mbar)


A compact Active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6 x 10⁻² to 6.6 x 10⁻¹⁰ mbar (5 x 10⁻² to 5 x 10⁻¹⁰ Torr) and a 1 V/decade linear output.
The new AIGX gauge from Edwards incorporates all the benefits of the industry standard Active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments.
The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Features and Benefits
• Full 8-decade measurement capability, to 6.6 x 10⁻¹⁰ mbar (5 x 10⁻¹⁰ Torr).
• Two versions available, each with three vacuum coupling variants: ‘D’ versions have a 9-pin ‘D’ connector and
standard interface;
• Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors.
• Automatic filament protection against switching on at atmosphere and running or degassing at high pressure